Product Features


● Fully Shielding Testing Chamber
Fully Shielding Chamber provide high precision testing result. Configure with standard chuck with upgrades to coaxial or triaxial for low-leakage current tests.
Moreover, the electrical testing with the APT probes and the fully shielding chamber achieve the Ultra low-leakage probe station.

● Multi DUT Testing System
Multi DUT testing System provide user flexible electrical testing condition on different DUTs.
While build model card extraction and FAT with Multi DUT Testing Systems can achieve the experiment more efficiency and flexible.

● Low Leakage Performance
Low Leakage Performance dominates the low current testing results.
With Fully Shielding Testing Chamber and Kelvin Probes
Testing System easily achieve the 10fA low leakage @ 0V bias.

Data Sheet


XY travel range: 300×300 mm
XY Resolution: 10 um
XYZ microscope travel range: 160x160x40 mm
Digital camera resolution: 500 M
 Leakage currents (bias voltage 0 V):
  • 50 fA with THH Probe (open ambient)
  • 20 fA with Kelvin Probe (open ambient)
  • 5 fA with Kelvin Probe (close ambient)
Dimensions (WxDxH): 2550x1530x1601 mm
Weight: 1400 kg