Product Features
探針台規格
● 溫度範圍 : RT
● Chuck尺寸 : 8″ wafer
● 高電壓範圍 : 200 V
● 低電流範圍 : <100 fA
● Pulse模組 ✔
● CV模組 ✔
● 外罩封箱(Shielding Box) ✔
適用量測類型
● FPD Testing
● On Wafer Device
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