Product Features

Semiauto probe station for high accuracy measurements of low signals on the wafer up to 6-inch diameter with inker.

Main Features:

  • Joystick chuck movement control
  • Inker unit for fault crystals
  • Contact sensor to check needle contact with the DUT
  • 3 microscope images at various magnifications ensure an optimum image of the DUT and the area around it
  • Pieces of a wafer can be processed
  • Сhamber provides electromagnetic shielding for high-accuracy measurements

Data Sheet

Weight: 400KG
Dimensions (WxDxH): L950 x W1600 H2010 mm
Power Consumption: AC220V Single phase
XY travel range: X 300mm x Y 500mm