4 Point Probe & Panel Measurement

Probe Station Specifications
● Temperature range : RT
● Chuck size : 8″ wafer or 32″ flat panel
● HV range : 200 V
● LC range : <100 fA
● Pulse module模組 ❌
● CV module ❌
● Shielding Box ✔

pplicable measurement type
● On High Power Chip / Module
● Four Points Prober (4PP)
● FPD Testing
● On Wafer Device